Humidity sensor element, device and method for manufacturing...

Measuring and testing – Gas analysis – Moisture content or vapor pressure

Reexamination Certificate

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C073S024040, C029S592100, C029S595000, C029S025350

Reexamination Certificate

active

10859240

ABSTRACT:
A humidity sensor element, a humidity sensor device and a method for manufacturing thereof are provided. The humidity sensor element includes a substrate having a nanocomposite film as sensing material, wherein said nanocomposite film consists of carbon nanotube/perfluorinated polymer with acid functional groups in weight ratio of 0.01-20; and at least a pair of electrodes, which contact with the sensing material at one or both side(s). The nanocomposite film increases the sensitivity of humidity sensor element such that even an infinitesimal amount of moisture can be detected with minimum detection limit of 15.76 ppmv.

REFERENCES:
patent: 4681855 (1987-07-01), Huang
patent: 5338430 (1994-08-01), Parsonage et al.
patent: 2004/0058226 (2004-03-01), Lamarre et al.
patent: 2004/0095043 (2004-05-01), Jitsukawa et al.
Alexander Star et al., Sensing with Nafion Coated Carbon Nanotube Field-Effedt Transistors, Aug. 15, 2003, Electroanalysis 2004, 16, No. 1-2, p. 108-112.

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