Measuring and testing – Gas analysis – Moisture content or vapor pressure
Reexamination Certificate
2007-09-18
2007-09-18
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Moisture content or vapor pressure
C073S024040, C029S592100, C029S595000, C029S025350
Reexamination Certificate
active
10859240
ABSTRACT:
A humidity sensor element, a humidity sensor device and a method for manufacturing thereof are provided. The humidity sensor element includes a substrate having a nanocomposite film as sensing material, wherein said nanocomposite film consists of carbon nanotube/perfluorinated polymer with acid functional groups in weight ratio of 0.01-20; and at least a pair of electrodes, which contact with the sensing material at one or both side(s). The nanocomposite film increases the sensitivity of humidity sensor element such that even an infinitesimal amount of moisture can be detected with minimum detection limit of 15.76 ppmv.
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Chen Hui Wen
Su Pi Guey
Sun Yi Lu
Wu Ren Jang
Christensen Ryan
Industrial Technology Research Institute
Williams Hezron
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