Humidity sensor element containing polyphenylsulfone

Details Humidity sensor element containing polyphenylsulfone Humidity sensor element containing polyphenylsulfone

2005-09-06

2005-09-06

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

C073S029010, C073S029050, C073S031050, C422S088000

Reexamination Certificate

active

06938482

ABSTRACT:
A humidity sensor element for a humidity sensing device includes a rigid, p doped silicon substrate, a non-porous terminal on one side of the substrate, a porous terminal on a second side of the substrate, and a layer of polyphenylsulfone between the porous terminal and the substrate. The sensor elements displays improved linear response with humidity changes and very low hysteresis.

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