Humidity sensor element

Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting

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252520, H01L 700

Patent

active

043440622

ABSTRACT:
A humidity sensor element comprising a metal oxide semiconductor sintered member having a composition composed of TiO.sub.2 and V.sub.2 O.sub.5, the member being formed with a pair of electrodes. When the element is used at a temperature of less than 400.degree. C., it is possible to detect the humidity as a variation of electric resistance.

REFERENCES:
patent: 3721631 (1973-03-01), Sumi et al.
patent: 3748625 (1973-07-01), Bennewitz
patent: 4015230 (1977-03-01), Nitta et al.

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