Humidity sensor, comprised of compound metal oxides with perovsk

Details Humidity sensor, comprised of compound metal oxides with perovsk Humidity sensor, comprised of compound metal oxides with perovsk

1983-04-01

1984-11-20

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

252518, H01L 700

Patent

active

044841728

ABSTRACT:
An improved humidity sensitive semiconductor device comprising an insulating base member and a humidity sensitive coating on said base member having at least two spread apart metal electrodes connected thereto, the coating comprising a metal oxide of a lanthanide cobaltate of the formula L.sub.1-x Sr.sub.x CoO.sub.3 where L is a member of the lanthanide series of elements selected from the group lanthanum, cerium, praseodymium, neodymium, promethium, smarium, europium, gadolinium, terbium, sysprosium, holmium, erbium, thulium, ytterbium, and lutetium and x is from about 0 to about 0.5 and an anion selected from the group consisting essentially of the organic anions of monobasic acids, dibasic acids or polybasic acids, inorganic anions and mixtures thereof.

REFERENCES:
patent: 3922204 (1975-11-01), Tseung et al.
patent: 3951603 (1976-04-01), Obayashi et al.
patent: 4015230 (1977-03-01), Nitta et al.
patent: 4357426 (1982-11-01), Murata et al.

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