Humidity sensor and method for producing the same

Details Humidity sensor and method for producing the same Humidity sensor and method for producing the same

1989-11-30

1991-12-24

Lateef, Marvin M.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

H01C 700

Patent

active

050756672

ABSTRACT:
A humidity sensor and a method for producing the same, in which an insulating film is first formed on a substrate. A first sensing film is formed on a first electrode to be separated by a space from the insulating film. A second sensing film of the same material as the first sensing film is again formed on the first sensing film and the insulating film, the space therebetween being filled with the second sensing film. Thus a uniform surface etching of the second sensing film is effected, to obtain a continuous flat film layer composed of the sensing film and the insulating film with a continuous flat surface, and in which a second electrode is formed on at least the sensing film.

REFERENCES:
patent: 4143177 (1979-03-01), Kovac et al.
patent: 4203087 (1980-05-01), Kovac et al.
patent: 4482581 (1984-11-01), Lorin et al.
patent: 4638346 (1987-01-01), Inami et al.
patent: 4642601 (1987-02-01), Sugawara et al.
patent: 4677416 (1987-06-01), Nishimoto et al.
patent: 4928513 (1990-05-01), Sugihara et al.

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