Measuring and testing – Gas analysis – Moisture content or vapor pressure
Patent
1994-08-08
1995-12-12
McMahon, Timothy M.
Measuring and testing
Gas analysis
Moisture content or vapor pressure
7333504, G01N 3318
Patent
active
054739330
ABSTRACT:
A humidity sensor with an excellent water-repelling property is presented by covalently bonding a monomolecular film containing fluoroalkyl groups to the surface of a humidity sensing element, used for the sensor, via siloxane bonding. A chemically adsorbed monomolecular film containing fluoroalkyl groups is formed on the surface of a humidity sensing element via siloxane bonding after dipping and holding the element in a surface active solution such as heptadecafluorotridecyl trichlorosilane, and removing the unreacted material.
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Ikuta Shigeo
Ogawa Kazufumi
Ozaki Shinji
Soga Mamoru
Carpenter Robert
Matsushita Electric - Industrial Co., Ltd.
McMahon Timothy M.
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