Humidity sensor

Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting

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200 6106, H01C 1300

Patent

active

039613011

ABSTRACT:
The operation of relative humidity sensors made from cobalt oxide on a non-conductive ceramic substrate is improved by (1) providing a porous, sputtered overcoat of polytetrafluoroethylene which renders the sensor surface non-wettable without affecting other properties, and (2) providing a printed heating element on the back surface of the sensor, enabling in situ degassing of chemisorbed or adsorbed impurities and regeneration of a nascent sensor surface.

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patent: 3496336 (1970-02-01), Hingorany et al.
patent: 3715702 (1973-02-01), Nicholas
patent: 3868492 (1975-02-01), Taylor

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