Humidity sensor

Details Humidity sensor Humidity sensor

1981-09-14

1982-07-06

Woodiel, Donald O.

Measuring and testing

Gas analysis

Moisture content or vapor pressure

29620, 338 35, G01W 100

Patent

active

043376584

ABSTRACT:
A humidity sensor having an extended impedance range extending up to 10.sup.12 ohms precludes leakage currents. The sensor is in the form of an insulating substrate having conductive film such as gold applied to a surface thereof. The perimeter of a first film is completely encompassed by but spaced from a second film on the surface of the substrate. A humidity responsive layer of iron oxide is applied over the film layers to bridge the spacing therebetween in a continuous manner. Electrical terminals are connected, respectively, to the two films to provide a readout in terms of humidity.

REFERENCES:
patent: 3671913 (1972-06-01), Mamiya et al.
patent: 4143177 (1979-03-01), Kovac et al.
patent: 4203087 (1980-05-01), Kovac et al.

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