Humidity sensor

Details Humidity sensor Humidity sensor

1989-06-23

1991-03-19

Reynolds, Bruce A.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

H01C 700

Patent

active

050014536

ABSTRACT:
A humidity sensor including an insulating substrate, a pair of electrodes formed on the insulating substrate, and a porous silica film with carbon particles dispersed therein is formed over the insulating substrate and electrodes. A silica film may be formed over the porous silica film or directly on the porous silica film containing carbon particles, or directly on the insulating substrate with the electrodes formed thereon to increase adhesion between the porous silica film and the substrate.

REFERENCES:
patent: 4057823 (1977-11-01), Burkhardt et al.
patent: 4621249 (1986-11-01), Uchikawa et al.
patent: 4673910 (1987-06-01), Uchikawa et al.
patent: 4768012 (1988-08-01), Williams et al.
patent: 4876890 (1989-10-01), Mercer et al.

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