Humidity sensing element of electric capacitance change type and

Details Humidity sensing element of electric capacitance change type and Humidity sensing element of electric capacitance change type and

1979-02-21

1981-06-30

Gantz, Delbert E.

Chemistry: electrical and wave energy

Processes and products

204 37R, 73335, 29570, H01G 905

Patent

active

042761280

ABSTRACT:
A device comprising a dielectric oxide film formed by anodization of a surface region of a valve metal body, a semiconductive metal oxide layer porously formed on the dielectric oxide film, and a gas permeable electrode layer formed on the semiconductive metal oxide layer with the interposal of a gas permeable carbon layer therebetween. The semiconductive metal oxide layer is formed by pyrolysis of a metal salt solution so as to be, microscopically, only partially in contact with the dielectric oxide film. After forming of the electrode layer, the device is immersed in boiling water and/or kept in a high temperature high humidity atmosphere for an adequate amount of time to stabilize the semiconductive metal oxide layer, resulting in that the semiconductive metal oxide layer has a multiplicity of microscopic crevices and that the device becomes quite stable in the relation between humidity and electrostatic capacitance of the device.

REFERENCES:
patent: 3376481 (1968-04-01), Klerer
patent: 3987676 (1976-10-01), Bennewitz
patent: 4038159 (1977-07-01), Nishino et al.

Affiliated with

Also associated with

Rating

Humidity sensing element of electric capacitance change type and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Humidity sensing element of electric capacitance change type and, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Humidity sensing element of electric capacitance change type and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2434147