Humidity sensing element

Details Humidity sensing element Humidity sensing element

1984-08-16

1986-01-14

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

733365, H01G 520

Patent

active

045648824

ABSTRACT:
The structure consists of a substrate, a set of interdigitated electrodes deposited on the substrate surface. The electrode fingers have a period less than the substrate thickness. A first water permeable polymer film is deposited over the electrodes and a conductive mesh is formed over the first polymer film. A second polymer film is deposited over the mesh burying the mesh between the two polymer films. The spacing between openings of the mesh is less than the thickness of the second polymer film. The square of the sum of the two polymer film thicknesses is minimized so that the response time is minimized. The mesh conductivity is made greater than a minimum value so that the resistive component of the impedance is small compared with the capacitive impedance, and thus the device impedance is independent of any instabilities in the conductive mesh impedance.

REFERENCES:
patent: 4424508 (1984-01-01), Harata et al.
patent: 4442422 (1984-04-01), Murata et al.

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