Humidifying apparatus, lithographic apparatus and...

Details Humidifying apparatus, lithographic apparatus and... Humidifying apparatus, lithographic apparatus and...

2011-01-11

2011-01-11

Bushey, Scott (Department: 1797)

Gas and liquid contact apparatus

Contact devices

Porous sheet

C261SDIG065

Reexamination Certificate

active

07866637

ABSTRACT:
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapor of the liquid and is liquidphilic to said liquid.

REFERENCES:
patent: 4355636 (1982-10-01), Oetjen et al.
patent: 4367734 (1983-01-01), Benthin
patent: 4381267 (1983-04-01), Jackson
patent: 5273689 (1993-12-01), Hamasaki
patent: 5348691 (1994-09-01), McElroy et al.
patent: 5653920 (1997-08-01), DiDomenico
patent: 5738808 (1998-04-01), Iwamoto
patent: 6158721 (2000-12-01), Katou et al.
patent: 2002/0124431 (2002-09-01), Duhaut et al.
patent: 2004/0245658 (2004-12-01), Niland et al.
patent: 2006/0205301 (2006-09-01), Klare et al.
patent: 2006/0285091 (2006-12-01), Parekh et al.
patent: 7-243675 (1995-09-01), None
patent: 10-197016 (1998-07-01), None
patent: 2005337640 (2005-08-01), None
patent: 2006528431 (2006-12-01), None
Japanese Office Action in related application No. 2008-012414, mailed Aug. 20, 2010.

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