Hot Isostatic pressing of a planar optical waveguide

Details Hot Isostatic pressing of a planar optical waveguide Hot Isostatic pressing of a planar optical waveguide

1998-10-19

2000-09-26

Hoffmann, John

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

With measuring, controlling, sensing, programming, timing,...

65386, C03B 1100, C03B 2902

Patent

active

061229342

ABSTRACT:
An optical waveguide device is provided with a core formed on a substrate and a clad layer. A low-temperature film-forming method, such as the CVD or PVD method, is used in a core forming process for forming the core and a clad forming process for forming the clad layer. The surface of the clad layer is coated with a protective film of chrome or the like in a protective film forming process that is carried out after the clad forming process. In a heating/pressurizing process that is carried out after the protective film forming process, the clad layer is heated and pressurized from its outside by the HIP (hot isostatic pressing) method. This heating/pressurizing process substantially eliminates voids in the clad layer and the like, and enhances or improves the density of a buffer layer, core, and upper clad layer and the transparency of the core layer. The protective film is removed by etching or the like in a removing process.

REFERENCES:
patent: 4231775 (1980-11-01), Siegmund
patent: 4494968 (1985-01-01), Bhagavatula
patent: 5152818 (1992-10-01), Berkey
patent: 5735927 (1998-04-01), Sanghera
patent: 5837024 (1998-11-01), Fabian
patent: 5858051 (1999-01-01), Komiyama
patent: 5917109 (1999-06-01), Berkey

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