Hot filament CVD of diamond films

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating

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427122, C23C 1626

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059391405

ABSTRACT:
An object of the invention is to provide a high quality synthetic diamond having a high bonding strength between a substrate surface and synthetic diamond or between synthetic diamond films. The object can be attained by a process for the synthesis of diamond comprising pre-heating mixed gases of a hydrocarbon and hydrogen by a heating body and feeding the heated mixed gases to a substrate surface heated to deposit diamond thereon, characterized by allowing the distance between the heating body and substrate surface to be apart from each other as far as possible in the carburizing step of the heating body and allowing the distance between the heating body and substrate surface to be nearer in the step of synthesizing diamond than in the former case.

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Patent Abstracts of Japan, vol. 12, No. 414 (E-677) Nov. 2, 1988 & JP-A-63-153 815 (Fujitsu Ltd) Jun. 27, 1988, *abstract*.
Schwarzbach et al., "Internal Stresses In CVD Diamond Layers", Diamond And Related Materials, vol. 3, No. 4/6, Apr. 1994, Lausanne, CH, pp. 757-764.
HSU, "Mole Fractions Of H, CH.sub.3, And Other Species During Filament-Assisted Diamond Growth", Applied Physics Letters, vol. 59, No. 12, Sep. 16, 1991, New York, pp. 1427-1429.

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