Hot filament, arc type ion source and method

Details Hot filament, arc type ion source and method Hot filament, arc type ion source and method

1977-03-02

1978-07-25

Esposito, Michael F.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427111, 427122, 427140, 427142, 204298, B32B 3500, C23C 1110

Patent

active

041030427

ABSTRACT:
A method and apparatus for providing an improved hot filament, arc type ion source is disclosed. The arc type ion source utilizes a filament having a carburized surface layer and/or means to provide a hydrocarbon gas containing atmosphere about said filament. The method includes providing an atmosphere containing a hydrocarbon gas about said filament so that the filament can be continuously carburized as part of the ion source.

REFERENCES:
patent: 1566848 (1925-12-01), Fonda
patent: 1600203 (1926-09-01), Campbell
patent: 1659749 (1928-02-01), Skaupy
patent: 1664136 (1928-03-01), Shaw
patent: 2367331 (1945-01-01), Bondley
patent: 3107180 (1963-10-01), Dieffendorf
Schneider, Thermionic Emission of Thoriated Tungsten, J. of Chem. Physics, vol. 28, No. 4 (4-1958) pp. 675-682.

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