Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Shaping against forming surface
Reexamination Certificate
2005-09-30
2009-12-01
Daniels, Matthew J. (Department: 1791)
Plastic and nonmetallic article shaping or treating: processes
Mechanical shaping or molding to form or reform shaped article
Shaping against forming surface
C264S293000, C977S887000
Reexamination Certificate
active
07625513
ABSTRACT:
A hot embossing lithography method includes the steps of: providing a press mold (20) having a press surface, the press surface having a pattern defined therein; providing a substrate (10′) having a polymer thin film (30) formed thereon; aligning the press mold with the polymer thin film; introducing a vapor to moisten the press surface for lowering a surface adsorption energy of the press surface; heating the polymer thin film to a temperature above a glass transition temperature of the polymer thin film, thereby softening the polymer thin film; pressing the press mold into the softened polymer thin film to transfer the pattern of the press mold into the polymer thin film; cooling the polymer thin film and the press mold to a temperature near the glass transition temperature of the polymer thin film; and separating the press mold from the polymer thin film.
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Daniels Matthew J.
Hon Hai Precision Industry Co. Ltd.
Reiss Steven M.
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