Coating processes – Interior of hollow article coating – Coating by vapor – gas – mist – or smoke
Reexamination Certificate
2005-09-13
2005-09-13
Meeks, Timothy (Department: 1762)
Coating processes
Interior of hollow article coating
Coating by vapor, gas, mist, or smoke
C427S248100, C427S255280, C427S235000, C134S022100, C216S037000, C216S063000, C118S7230HC
Reexamination Certificate
active
06942892
ABSTRACT:
The present invention provides a method for efficiently and completely removing a film deposited inside a film forming chamber. In addition, the invention provides a CVD apparatus using heating element which an in-situ cleaning method can be applied and its in-situ leaning method.The removal method of this invention comprises a method for removing a film deposited inside a chamber which can be exhausted and/or on a member placed in the chamber, wherein after the chamber is exhausted, a heating element, at least the surface of which is composed of platinum, disposed in said vacuum chamber, is heated at a prescribed temperature and a cleaning gas which is decomposed and/or activated by the heating element to generate an activated species that converts the deposited film into gaseous substance is introduced into the chamber.
REFERENCES:
patent: 4450031 (1984-05-01), Ono et al.
patent: 4452642 (1984-06-01), Dietz et al.
patent: 5149375 (1992-09-01), Matsuyama
patent: 5216241 (1993-06-01), Hatakeyama et al.
patent: 5221427 (1993-06-01), Koinuma et al.
patent: 5637153 (1997-06-01), Niino et al.
patent: 5709757 (1998-01-01), Hatano et al.
patent: 6101972 (2000-08-01), Bluck et al.
patent: 6107197 (2000-08-01), Suzuki
patent: 6192897 (2001-02-01), Klebanoff et al.
patent: 6235951 (2001-05-01), Sakyu et al.
patent: 6375756 (2002-04-01), Ishibashi
patent: 6410454 (2002-06-01), Muranaka et al.
patent: 6592771 (2003-07-01), Yamanaka et al.
patent: 03-226578 (1991-10-01), None
patent: 06-338491 (1994-12-01), None
patent: 08-241865 (1996-09-01), None
patent: 09-045623 (1997-02-01), None
patent: 10-083988 (1998-03-01), None
patent: 11-054441 (1999-02-01), None
Anelva Corporation
Baker & Daniels
Markham Wesley D.
Meeks Timothy
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