Horizontal-post/vertical-flexure arrangement for supporting larg

Details Horizontal-post/vertical-flexure arrangement for supporting larg Horizontal-post/vertical-flexure arrangement for supporting larg

1996-03-22

1997-10-21

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356346, G01B 902

Patent

active

056802145

ABSTRACT:
A scanning phase-shifting mechanism comprising reference optics supported by three independent supporting members disposed in fixed triangular relation in a plane substantially normal to the optical axis of the instrument. Two upper members support all of the weight of the optics and provide a preferably horizontal, first axis of rotation for adjustment of the tip of the optics in relation to the optical axis of the instrument. The lower member does not support any of the weight of the optics, providing instead only longitudinal support to cause motion during translation. In addition, in conjunction with at least one of the upper members, the lower member provides a second axis of rotation, preferably orthogonal to the first axis, for adjustment of the tilt of the optics. Each supporting member is rigidly connected to a first end of a cantilevered flexure which is anchored at the other end to a stationary support structure housing the micromotion-translation mechanism of the phase-shifting interferometer. A piezoelectric element couples the support structure with the first end of each flexure.

REFERENCES:
patent: 4844614 (1989-07-01), Henderson et al.
patent: 4884003 (1989-11-01), Hayes
patent: 5239361 (1993-08-01), Burch
patent: 5473434 (1995-12-01), De Groot
patent: 5481359 (1996-01-01), Barker

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