Gas separation – Combined or convertible – In environmental air enclosure
Patent
1988-12-22
1990-05-22
Nozick, Bernard
Gas separation
Combined or convertible
In environmental air enclosure
55DIG29, 55DIG18, 55473, 981153, B01D 5000
Patent
active
049274384
ABSTRACT:
A load chamber of a load lock is provided with a vertical air curtain which isolates the load chamber from the general clean room environment. Horizontal air flows generated in the load chamber bathe wafers held horizontally in the chamber with filtered air. These horizontal air flows are captured by the air curtain and recirculated to filters which provide horizontal and vertical air flows in the load chamber. If desired, the vertical and horizontal flows may be driven by the air supply mechanism of the clean room itself.
REFERENCES:
patent: 3229611 (1966-01-01), Berger
patent: 3254588 (1966-06-01), Truhan
patent: 3318076 (1967-05-01), Baker
patent: 3354495 (1967-11-01), Lawrence, III
patent: 3380369 (1968-04-01), Allander
patent: 3494112 (1970-02-01), Deckas
patent: 3645191 (1972-02-01), Asker et al.
patent: 3664253 (1972-05-01), Asker et al.
patent: 3728866 (1973-04-01), Layton
patent: 3776121 (1973-12-01), Truhan
patent: 3942964 (1976-03-01), Shuler
patent: 3998142 (1976-12-01), Foreman et al.
patent: 4009647 (1977-03-01), Howorth
patent: 4050368 (1977-09-01), Eakes
patent: 4100847 (1978-07-01), Norton
patent: 4211155 (1980-07-01), Stoll et al.
patent: 4548627 (1985-10-01), Landy
patent: 4660464 (1987-04-01), Tanaka
patent: 4699640 (1987-10-01), Suzuki et al.
patent: 4770680 (1988-09-01), Machida et al.
Jennings Robert E.
Mears Eric L.
Cole Stanley Z.
Dooher Terrence E.
Fisher Gerald M.
Nozick Bernard
Varian Associates Inc.
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