Horizontal/inclined substrate holder for liquid phase epitaxy

Details Horizontal/inclined substrate holder for liquid phase epitaxy Horizontal/inclined substrate holder for liquid phase epitaxy

1979-03-02

1980-03-04

Watson, Robert C.

Work holders

Suspended holder

296321WE, B25B 1100

Patent

active

041913655

ABSTRACT:
A substrate holder for use in liquid phase epitaxy growth of magnetic garnet films for bubble memories comprising a dipping rod having substrate holding means including hooks at one end which confine the substrate securely yet permit tilting movement so as to allow the substrate to assume a horizontal position for liquid phase epitaxy growth in the flux in which the substrate is immersed and to assume a tilted position as the substrate is being withdrawn from the flux for flux runoff. One embodiment discloses a substrate holder for one substrate while a second embodiment shows a holder for supporting a plurality of substrates for processing a batch of substrates in one operation.

REFERENCES:
patent: 521963 (1894-06-01), Nason
patent: 2095295 (1937-10-01), Smith et al.
patent: 4077832 (1978-03-01), Robertson et al.

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