Horizontal and tuning fork vibratory microgyroscope

Details Horizontal and tuning fork vibratory microgyroscope Horizontal and tuning fork vibratory microgyroscope

2006-02-28

2006-02-28

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504160

Reexamination Certificate

active

07004024

ABSTRACT:
A horizontal and tuning fork vibratory microgyroscope is provided for detecting angular velocity and angular acceleration of an inertial object when the inertial object is rotated, wherein resonance directions of the microgyroscope are on the same horizontal plane in both sensing and driving modes. The microgyroscope includes a substrate, an anchored pad unit, an outer elastic element unit, an outer frame, a sensing electrode unit, an inner elastic element unit including a plurality of inner elastic elements connected to the inside of the outer frame, an inner weighted element unit including a pair of first and second inner weighted elements each having a driven comb, and a driven electrode unit including a comb drive forming a comb structure.

REFERENCES:
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5747690 (1998-05-01), Park et al.
patent: 6134961 (2000-10-01), Touge et al.
patent: 6742390 (2004-06-01), Mochida et al.
patent: 6752017 (2004-06-01), Willig et al.

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