Homogenizer

Details Homogenizer Homogenizer

2005-06-07

2005-06-07

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S627000

Reexamination Certificate

active

06903859

ABSTRACT:
An aspect of the present invention includes a method for homogenizing a beam of electromagnetic radiation. Said beam of electromagnetic radiation is impinged onto a first array of deflecting elements. Said beam of electromagnetic radiation is dispersed into a number of spatially separated beamlets by said first array of deflecting elements. Said beamlets are deflected by said first array of deflecting elements. Said deflected beamlets are impinged onto a second array of deflecting elements. Said beamlets are superimposed at a target plane to thereby form a radiation beam having a homogenized spatial intensity distribution. The invention also relates to an apparatus for homogenizing a beam of electromagnetic radiation.

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P. Kruit “High Throughout Electron Lithography With the Multiple Aperture Pixel By Pixel Enhancement of Resolution Concept” J. Vac. Sci. Technol. B. 16(6) Nov/Dec 1998 American Vacuum Society pp. 3177-3180.

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