Homogeneous fine grained metal film on substrate and manufacturi

Details Homogeneous fine grained metal film on substrate and manufacturi Homogeneous fine grained metal film on substrate and manufacturi

1989-01-23

1990-05-08

Silverman, Stanley

Metal treatment

Compositions

Heat treating

427 38, 437194, 437957, C23C 806

Patent

active

049235265

ABSTRACT:
A homogeneous fine grained metal film (6') on a substrate in accordance with the present invention comprises multiple metal layers and intervening layers (14) between the respective metal layers, the intervening layers being formed of a compound of the metal and a reactive gas and serving to suppress growth of grains (12') in the respective metal layers and to suppress electromigration of grain boundaries (13').
In a method for manufacturing a metal film (6') having homogeneous and fine grains on a substrate in accordance with the present invention, one or more intervening layers (14) are formed by introducing a gas reactive with the metal film one or more times during deposition of the metal film, whereby intervening layers of a metal compound are interposed between the successively deposited metal layers. Thus, a metal film of multilayered structure including multiple metal layers separated by the intervening layers is formed.

REFERENCES:
patent: 4343890 (1982-08-01), Phillips et al.
patent: 4615747 (1986-10-01), Kato et al.
patent: 4649083 (1987-03-01), Fister et al.
Vossen et al (Ed.), Thin Film Processes (Academic Press, N.Y.), c. 1978, pp. 48-54.
Handbook of Thin Film Technology, herausgegeben von L. I. Maissel und R. Glang, MacGraw Hill Verlag, New York, 1970, S. 4-26 bis 4-31.

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