Homodyne laser interferometer probe and displacement...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Details

C356S482000

Reexamination Certificate

active

07847953

ABSTRACT:
A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4). Here, the reference light from the reflection mirror (6) is returned to measurement means along the same route. The measurement light from the second focal lens (7) is applied to a measurement object (8), and the measurement light (signal light) from the measurement object (8) is returned to the measurement means along the same route.

REFERENCES:
patent: 5388115 (1995-02-01), Kawashima et al.
patent: 7545508 (2009-06-01), Kawakatsu
patent: 6 185977 (1994-07-01), None
patent: 2003 114182 (2003-04-01), None

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