Radiation imagery chemistry: process – composition – or product th – Holographic process – composition – or product – Composition or product or process of making the same
Patent
1996-03-27
1998-01-06
Angebranndt, Martin
Radiation imagery chemistry: process, composition, or product th
Holographic process, composition, or product
Composition or product or process of making the same
430 1, 430 5, 430320, 359 15, G03H 116
Patent
active
057052980
ABSTRACT:
A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A holograph is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The holograph includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.
REFERENCES:
patent: 3537854 (1970-11-01), Grobin, Jr. et al.
patent: 3567305 (1971-03-01), Collier et al.
patent: 3582176 (1971-06-01), Mathisen
patent: 3630593 (1971-12-01), Bartelt et al.
patent: 3806221 (1974-04-01), Kiemle
patent: 3995948 (1976-12-01), Abe et al.
patent: 4148549 (1979-04-01), Termainis
patent: 4405410 (1983-09-01), Sebastien
patent: 4405701 (1983-09-01), Banks et al.
patent: 5083219 (1992-01-01), Jannson et al.
patent: 5109479 (1992-04-01), Williams
patent: 5141829 (1992-08-01), Dumas et al.
patent: 5153084 (1992-10-01), Foust et al.
patent: 5178976 (1993-01-01), Rose et al.
patent: 5278008 (1994-01-01), Moss et al.
patent: 5395718 (1995-03-01), Jensen et al.
Angebranndt Martin
Lucent Technologies - Inc.
LandOfFree
Holographic method for generating three dimensional conformal ph does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Holographic method for generating three dimensional conformal ph, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Holographic method for generating three dimensional conformal ph will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2327774