Optical: systems and elements – Holographic system or element – For reconstructing image
Patent
1996-03-27
1998-06-09
Dzierzynski, Paul M.
Optical: systems and elements
Holographic system or element
For reconstructing image
359 1, 359 8, 359 12, 430 5, 355 2, G03H 122
Patent
active
057643903
ABSTRACT:
A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A hologram is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The hologram includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.
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Dzierzynski Paul M.
Lucent Technologies - Inc.
Schuberg Darren E.
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