Holographic lithography

Details Holographic lithography Holographic lithography

1991-01-09

1992-08-25

Arnold, Bruce Y.

Dynamic information storage or retrieval

Combined independent audio systems

Radio

359 1, 359 30, 2502019, G03H 110

Patent

active

051423855

ABSTRACT:
First and second coherent beams illuminate a common area on an exposure station. A phase detector senses the relative phase between the first and second beams to provide a control signal. There is at least one phase shifter in the path of at least one of the coherent beams. The control signal is coupled to the phase shifter to adjust the phase imparted thereby so that the relative phase between the first and second coherent beams is substantially constant.

REFERENCES:
patent: 3622794 (1971-11-01), Pond
patent: 3632214 (1972-01-01), Chang et al.
patent: 3659947 (1972-05-01), Neumann
patent: 3923400 (1975-12-01), Hardy
patent: 4289403 (1981-09-01), Allington
patent: 4674824 (1987-06-01), Goodman et al.
patent: 4786124 (1988-11-01), Stone et al.
patent: 4963725 (1990-10-01), Hong et al.

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