Holographic interference exposing device

Details Holographic interference exposing device Holographic interference exposing device

1993-08-30

1996-06-25

Lerner, Martin

Optical: systems and elements

Holographic system or element

Having particular recording medium

356347, 356349, 356363, 359 27, 359 30, G03H 104, G01B 902, G01B 1100

Patent

active

055305644

ABSTRACT:
A holographic interference exposing device using a visible laser source and a chopper to easily align the optical system while confirming the light path of the laser beam with the naked eye. The exposing device comprises a main laser source generating a short wavelength laser beam, a beam splitter for splitting the laser beam into two laser beams to cause a difference in the light path of the laser beam and to form an interference fringe on a semiconductor substrate, mirrors for guiding the laser beam to the beam splitter, and mirrors for focusing the two laser beams on a surface of the semiconductor substrate, an auxiliary laser source generating a long wavelength laser beam, and a chopper making the light path of the long wavelength laser beam get together with that of the short wavelength laser beam. The auxiliary laser source generates a visible laser beam having a wavelength longer than that of an ultraviolet laser beam.

REFERENCES:
patent: 4528464 (1985-07-01), Chemla et al.
patent: 5305123 (1994-04-01), Sadovnik et al.

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