Hollow waveguide for ultraviolet light and making the same

Details Hollow waveguide for ultraviolet light and making the same Hollow waveguide for ultraviolet light and making the same

1998-01-05

2000-10-31

Sanghavi, Hemang

Optical waveguides

Optical fiber waveguide with cladding

Utilizing nonsolid core or cladding

G02B 620

Patent

active

06141476&

ABSTRACT:
A hollow waveguide that transmits ultraviolet light with low attenuation. The present invention comprises a small-diameter, thin-wall, glass tube and a thin aluminum film on the inner surface of the glass tube. The aluminum film is deposited by a chemical vapor deposition method using an organometallic of aluminum as a precursor. The deposition process produces high smoothness of the film surface.

REFERENCES:
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patent: 4913505 (1990-04-01), Levy
patent: 4930863 (1990-06-01), Croitoriu et al.
patent: 5276761 (1994-01-01), Shimoyama
patent: 5440664 (1995-08-01), Harrington et al.
Kubo, ArF excimer laser delivery systems for medical applications Proceedings of SPIE, 1994, pp. 28-34, vol. 2131, SPIE, Bellingham U. S. A.

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