Hollow laminated piezoelectric element and its manufacturing...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Reexamination Certificate

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07411336

ABSTRACT:
A hollow laminated piezoelectric element having excellent durability and reliability and capable of obtaining a high output, and a method of manufacturing the hollow laminated piezoelectric element are provided. A hollow laminated piezoelectric element1comprises a ceramic laminate10that is formed by having alternately laminated piezoelectric layers11made of a piezoelectric material and internal electrode layers21and22having conductivity and by having a center through hole14formed to pass through the ceramic laminate10along a lamination direction. The ceramic laminate10has an internally terminated structure in the inside periphery having at least a portion of inside peripheral ends of the internal electrode layers21and22terminated within the ceramic laminate10so that at least a portion of the inside peripheral ends of the internal electrode layers21and22is not exposed to the inside peripheral surface104of the ceramic laminate10. The inside peripheral surface104of the ceramic laminate10has inside peripheral slits13having trenches provided in the peripheral direction toward the inside of the piezoelectric layers11from the inside peripheral surface104.

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