Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent
1974-09-23
1976-03-16
Demeo, Palmer C.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Electron or ion source
313206, 313209, 313362, H01J 724, H05B 706, H05H 100
Patent
active
039448738
ABSTRACT:
An ion source having an extremely high beam current density at low gas flow rates and therefore, low system pressures. The ion source includes an electrode system which consists of a cathode of, for example, spherical or cylindrical configuration which cathode encloses an anode having a pair of screen electrodes symmetrically disposed about and parallel to the plane of the anode, the anode and screen electrodes each having apertures formed therein. A gas inlet is formed in the cathode wall, preferably between the screen electrodes, and an ion beam outlet aperture of substantially the same size as the anode aperture is provided in the cathode. Upon application of suitable potentials to the anode, cathode and screen electrodes, the latter preferably being at a potential substantially equal to cathode potential, gas introduced through the gas supply inlet is ionised and the positive ions created are accelerated towards the cathode and emerge in a beam through the ion beam outlet aperture.
REFERENCES:
patent: 3262003 (1966-07-01), Allen et al.
patent: 3320475 (1967-05-01), Boring
patent: 3411035 (1968-11-01), Necker et al.
patent: 3784858 (1974-01-01), Franks
patent: 3831052 (1974-08-01), Knechtli
Baghurst Dennis John
Franks Joseph
DeMeo Palmer C.
Ion Tech Limited
LandOfFree
Hollow cathode type ion source system including anode screen ele does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Hollow cathode type ion source system including anode screen ele, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hollow cathode type ion source system including anode screen ele will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-294919