Holding unit, assembly system, sputtering unit, and...

Details Holding unit, assembly system, sputtering unit, and... Holding unit, assembly system, sputtering unit, and...

2006-08-25

2011-12-06

Shakeri, Hadi (Department: 3727)

Work holders

Magnetic holder

Reexamination Certificate

active

08070145

ABSTRACT:
Because an electromagnetic chuck supplies current to a specific microcoil among a plurality of microcoils and makes an object exert an electromagnetic force working together with a magnet of the object, the object can be held in a state where the object is set at a desired position (a position that corresponds to the microcoil to which current has been supplied) on a base surface. Further, by gas that blows out from a gas supply passage, a levitation force is given to the object, which can reduce effects of a friction force that acts between the object and an upper surface of the electromagnetic chuck when the position of the object is set.

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