Holding system, exposure apparatus, and device manufacturing...

Details Holding system, exposure apparatus, and device manufacturing... Holding system, exposure apparatus, and device manufacturing...

2007-05-15

2007-05-15

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C378S034000, C378S035000

Reexamination Certificate

active

11555711

ABSTRACT:
A holding system, provided on a movable stage, for holding an object from above, against gravity. The holding system includes at least one holding portion adapted to be in contact with the object, to hold the object from above, and at least one attracting portion for attracting a limited portion of the object upwardly, without contact thereto.

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patent: 6381005 (2002-04-01), Kasumi et al.
patent: 6404505 (2002-06-01), Matsui
patent: 6862080 (2005-03-01), Matsui
patent: 2005/0052634 (2005-03-01), Sugihara et al.
patent: 10-97985 (1998-04-01), None

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