Holding mechanism in exposure apparatus, and device...

Details Holding mechanism in exposure apparatus, and device... Holding mechanism in exposure apparatus, and device...

2006-06-27

2006-06-27

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C359S820000

Reexamination Certificate

active

07068348

ABSTRACT:
Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance can be reduced to assure desired imaging performance. The holding system for holding an optical member includes a barrel for at least partially surrounding the optical member and/or a heat source, an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.

REFERENCES:
patent: 4267523 (1981-05-01), Brown
patent: 6118599 (2000-09-01), Spinali
patent: 6390228 (2002-05-01), Serizawa et al.
patent: 6867848 (2005-03-01), Ebinuma et al.
patent: 2003/0035088 (2003-02-01), Emoto
patent: 7-153663 (1995-06-01), None

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