Holding device for optical element

Details Holding device for optical element Holding device for optical element

2011-01-11

2011-01-11

Ben, Loha (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S820000, C359S513000, C355S030000, C451S390000, C248S683000

Reexamination Certificate

active

07869147

ABSTRACT:
A device or the operation of a device for the holding, especially sealing support of an optical element, especially an optical lens with at least one holding element for mounting the optical element and preferably at least one sealing element for sealing contact at at least a part of the optical element and/or the holding element, wherein the sealing element or at least a part thereof is displaceable between a first position, in which the sealing element rests against the optical element and a second position, in which the sealing element is spaced apart from the optical element, or wherein the sealing element is switchable such that it rests against the optical element under different contact pressure or adjustable contact force. The holding element can either take on the holding function alone and independently of the sealing element or work together with the sealing element in this regard. The sealing element can also be provided separately and independently of the holding element, such that the holding element is optimizable to the holding function. Especially, the present invention concerns an immersion objective for microlithography in which at least one actuatable sealing element is provided.

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