Holding device for disk-shaped objects

Details Holding device for disk-shaped objects Holding device for disk-shaped objects

2007-10-23

2007-10-23

Carter, Monica (Department: 3722)

Chucks or sockets

With fluid-pressure actuator

Radially reciprocating jaws

C279S106000, C279S119000, C279S120000, C279S141000, C118S500000, C118S730000

Reexamination Certificate

active

10913891

ABSTRACT:
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.

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