Holding device for a disk and application therefor

Details Holding device for a disk and application therefor Holding device for a disk and application therefor

1989-07-12

1991-08-06

Bucci, David A.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

269 20, 269903, 118503, 118732, 118730, 20429815, 156345, 414217, 414757, 414781, C23C 1400

Patent

active

050372629

ABSTRACT:
A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the surface to be worked or secures the disk position with the aid of a ring which remains in the working position. Thereby the disk surface can be worked completely or with minimal shadowing and simultaneously the transport mechanics can be effectively protected against the working process, for example coating or etching. All parts continuously exposed to the working process can be readily exchanged. If the disk remains adhered in the working station, it is torn off by a form-fitting transport securement.

REFERENCES:
patent: 4189230 (1980-02-01), Zasio
patent: 4344383 (1982-08-01), Salt, Jr.
patent: 4422897 (1983-12-01), Horwitz
patent: 4441853 (1984-04-01), Kosugi
patent: 4473455 (1984-09-01), Dean et al.
patent: 4542298 (1985-09-01), Holden
patent: 4544311 (1985-10-01), Husain
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4674621 (1987-06-01), Takahashi
patent: 4764076 (1988-08-01), Layman et al.
patent: 4990047 (1991-02-01), Wagner et al.

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