Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-07-25
2006-07-25
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C355S077000
Reexamination Certificate
active
07081946
ABSTRACT:
A reticle holder18has; a first suction section63facing a precision warrantable area AR1having a predetermined surface precision, of a lower face Ra of a reticle R; a second suction section64facing a precision unwarrantable area AR2outside of the precision warrantable area AR1; a pore70aconnected to a suction apparatus which draws out gas in a space between the lower face Ra of the reticle R and the first suction section63, and a pore70bconnected to the suction apparatus72which draws out gas in the space between the lower face Ra of the reticle R and the second suction section64. As a result, the reticle can be held stably, without deteriorating the surface precision of the precision warrantable area.
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Hagiwara Tsuneyuki
Horikawa Hiroto
Mizutani Hideo
Yoshimoto Hiromitsu
Fuller Rodney
Nikon Corporation
Oliff & Berridg,e PLC
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