Holding apparatus for holding an article such as a semiconductor

Details Holding apparatus for holding an article such as a semiconductor Holding apparatus for holding an article such as a semiconductor

1992-07-06

1994-06-28

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

269286, B25B 1100

Patent

active

053240120

ABSTRACT:
A holder which cleanly holds an article such as a semiconductor wafer and which is high in rigidity, light in weight, high in dimensional stability and excellent in dust resistance. The wafer holder includes a vacuum holding surface formed with a plurality of concentric or helical annular projections and annular vacuum holding grooves which are arranged at a given pitch. A plurality of vacuum holes for vacuum holding purposes are formed in the respective annular grooves so as to be arranged radially and each of the vacuum holes is subjected to pressure reduction by a vacuum source through the interior of the holder, thereby correcting the flatness of a wafer to conform with the upper surfaces of the annular projections. At least the portions of the holder which contact with the wafer (preferably the holder on the whole) are made of a sintered ceramic containing covalent bond-type conductive material such as a TiC-containing sintered Al.sub.2 O.sub.3 so that the contact portions exhibit conductivity and also less pores are present in the surface, thereby practically preventing the occurrence and deposition of fine particles.

REFERENCES:
patent: 4049484 (1977-09-01), Priest et al.
patent: 4088312 (1978-05-01), Frosch et al.
patent: 4131267 (1978-12-01), Ono et al.
patent: 4183545 (1980-01-01), Daly
patent: 4616796 (1986-10-01), Inoue
patent: 4856766 (1989-08-01), Huberts
patent: 4906011 (1990-03-01), Hiyamizu et al.
patent: 4944904 (1990-07-01), Singh et al.
patent: 5067695 (1991-11-01), Huddleston

Affiliated with

Also associated with

Rating

Holding apparatus for holding an article such as a semiconductor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Holding apparatus for holding an article such as a semiconductor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Holding apparatus for holding an article such as a semiconductor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2373067