Holding apparatus and exposure apparatus

Details Holding apparatus and exposure apparatus Holding apparatus and exposure apparatus

2011-03-15

2011-03-15

Hasan, Mohammed (Department: 2873)

Optical: systems and elements

Lens

With support

C359S694000, C359S822000

Reexamination Certificate

active

07907358

ABSTRACT:
A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.

REFERENCES:
patent: 5822133 (1998-10-01), Mizuno et al.
patent: 6750947 (2004-06-01), Tomita et al.
patent: 7031082 (2006-04-01), Murasato
patent: 7161750 (2007-01-01), Takabayashi
patent: 3894509 (1997-04-01), None
patent: 11-149029 (1999-06-01), None

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