Holding apparatus

Details Holding apparatus Holding apparatus

2011-08-02

2011-08-02

Kramer, Dean J (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Fixed and moveable jaw

C294S082230, C414S941000

Reexamination Certificate

active

07988216

ABSTRACT:
A holding apparatus for holding a semiconductor wafer comprises a pneumatic cylinder, a plunger movably connected to the pneumatic cylinder, an inlet pipe connected to the pneumatic cylinder, and a relief valve connected to the inlet pipe. Clean dry air is pumped into the pneumatic cylinder through the inlet pipe to impel the plunger in a first direction to contact the wafer. A part of the air in the inlet pipe is discharged through the relief valve to regulate air pressure to the pneumatic cylinder.

REFERENCES:
patent: 3727772 (1973-04-01), Pauls
patent: 4238169 (1980-12-01), DePriester et al.
patent: 4907834 (1990-03-01), Dejong et al.
patent: 5335955 (1994-08-01), Pekka et al.
patent: 6256555 (2001-07-01), Bacchi et al.
patent: 6454332 (2002-09-01), Govzman et al.
patent: 6913302 (2005-07-01), Yokota et al.
patent: 7290813 (2007-11-01), Bonora et al.
patent: 7334826 (2008-02-01), Woodruff et al.
patent: 2002/0071756 (2002-06-01), Gonzalez
patent: 2006/0192400 (2006-08-01), Kim et al.
patent: 2007/0216179 (2007-09-01), Hirooka et al.
patent: 200739794 (2007-10-01), None

Affiliated with

Also associated with

Rating

Holding apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Holding apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Holding apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2722567