Holder of photomask

Details Holder of photomask Holder of photomask

2006-03-07

2006-03-07

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C206S454000

Reexamination Certificate

active

07009689

ABSTRACT:
An apparatus suitable for holding a photomask comprises a photomask holder having a plurality of through holes and a plurality of protrusions detachably connected to the photmask holder via the through holes. The photomask is positioned on supporting ridges of the protrusions so that the friction between the protrusions and the photomask is prevented, and the generation of particulates can be effectively reduced.

REFERENCES:
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patent: 5743409 (1998-04-01), Nakahara et al.
patent: 5823736 (1998-10-01), Matsumura
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6606145 (2003-08-01), Irie et al.
patent: 2003/0218728 (2003-11-01), del Puerto et al.
patent: 2003/0227605 (2003-12-01), del Puerto et al.

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