Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2005-04-19
2005-04-19
Duda, Rina (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C318S687000, C318S135000, C318S649000, C355S053000, C355S055000, C355S072000, C355S074000, C355S075000
Reexamination Certificate
active
06882126
ABSTRACT:
A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder24and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).
REFERENCES:
patent: 4444492 (1984-04-01), Lee
patent: 4698575 (1987-10-01), Bouwer
patent: 4775877 (1988-10-01), Kosugi et al.
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 4910549 (1990-03-01), Sugita
patent: 5623853 (1997-04-01), Novak et al.
patent: 5858587 (1999-01-01), Yamane et al.
patent: 6217034 (2001-04-01), Smedt et al.
patent: 6486941 (2002-11-01), Hazelton et al.
patent: 6522389 (2003-02-01), Fujimoto
patent: 20020037460 (2002-03-01), Takahashi
patent: 2002-50560 (2002-02-01), None
U.S. patent application Ser. No. 09/919,940, Takahashi, filed Aug. 2, 2001, Stage Unit, Measurement Unit and Measurement Method, and Exposure Apparatus and Exposure Method.
U.S. patent application Ser. No. 09/635,339, Shiraishi et al., filed Aug. 9, 2000, Adjusting Method for Position Detecting Apparatus.
Binnard Mike
Hazelton Andrew J.
Lee Martin E.
Watson Douglas C.
Duda Rina
Nikon Corporation
Roeder Steven G.
Rose Jim
LandOfFree
Holder mover for a stage assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Holder mover for a stage assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Holder mover for a stage assembly will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3425280