Holder for wafers

Details Holder for wafers Holder for wafers

2007-05-29

2007-05-29

Morgan, Elleen P. (Department: 3723)

Abrading

Work holder

C438S403000, C269S900000, C269S903000

Reexamination Certificate

active

11130294

ABSTRACT:
The present invention provides a holder (20) for wafers (14) which makes it possible to more easily manipulate the wafer (14) and makes it more suitable than prior art devices for to liquid handling, wafer handling and on-wafer manipulation of substances, while it also makes it possible to align the wafer (14) accurately and furthermore allows to create a well controlled ambient in the neighbourhood of the wafer (14).

REFERENCES:
patent: 3678385 (1972-07-01), Bruner
patent: 5314538 (1994-05-01), Maeda et al.
patent: 6111225 (2000-08-01), Ohkase et al.
patent: 6296712 (2001-10-01), Guo et al.
patent: 2001/0050567 (2001-12-01), Bachelder et al.
patent: 2002/0187262 (2002-12-01), Rocha-Alvarez et al.
patent: 2004/0115947 (2004-06-01), Fink et al.
patent: 2005/0217799 (2005-10-01), O'Meara et al.
patent: WO 99/25896 (1999-05-01), None

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