Holder for reflecting member and exposure apparatus having the s

Details Holder for reflecting member and exposure apparatus having the s Holder for reflecting member and exposure apparatus having the s

1997-11-12

2000-03-28

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 359849, G03B 2742, G02B 508

Patent

active

060438630

ABSTRACT:
A holder improving the optical performance of a reflecting optical member in a projection optical system which projects an image of a pattern formed on a mask onto a photosensitive substrate, and an exposure apparatus having the holder. A support mechanism supports a back surface of the reflecting optical member, which is reverse to a reflecting surface thereof, at at least three points. The support points are positioned on a circumference away from the center of the reflecting surface by a distance at least 0.6 times the distance from the center of the reflecting surface to the outer periphery of the reflecting optical member such that the support points are circumferentially spaced along the circumference at equal intervals. Alternatively, a holding member supports the reflecting optical member and forms a closed chamber in combination with the reflecting optical member. The pressure in the closed chamber at the back of the reflecting surface of the reflecting optical member is regulated to a predetermined level. The reflecting optical member is integrally formed with a mounting portion which is secured to the projection optical system.

REFERENCES:
patent: 4364631 (1982-12-01), Arondel et al.
patent: 4408874 (1983-10-01), Zinky et al.
patent: 4632523 (1986-12-01), Knohl
patent: 5035497 (1991-07-01), Itoh
patent: 5115351 (1992-05-01), Miyawaki et al.
"Opto-Mechanical Systems Design", Paul R. Yoder, Jr., Mounting Large Vertical Axis Mirrors; Published Dekker Optical Engineering; vol. 9, 1996.

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