Coating apparatus – Work holders – or handling devices
Patent
1980-12-22
1982-09-21
Smith, John D.
Coating apparatus
Work holders, or handling devices
118503, 118428, 148171, 211 41, 269903, 156621, B05C 1302
Patent
active
043501168
ABSTRACT:
A holder for liquid phase epitaxial (LPE) growth which eliminates mesas on the surface of the film is described. The holder has two legs to which a ring is connected. The ring has holding means so that it can hold one wafer or two wafers back-to-back. One of the two legs extends vertically below the first ring. In a preferred embodiment a second ring having holding means for a pair of wafers back-to-back is attached to the elongated leg. This holder structure prevents a film from the liquid melt from forming when the holder is withdrawn from the liquid growth solution, thereby eliminating the formation of mesas which occur when the film ruptures.
REFERENCES:
patent: 3974797 (1976-08-01), Hutson
patent: 4190683 (1980-02-01), Davies et al.
Yamaguchi et al, "Epitaxial Growth of YSmLuCaGeIG Films With Three Micron Diameter Magnetic Bubbles", Fujitsu Scientific and Technical Journal, vol. 15, No. 1, Mar. 1979, pp. 69-90.
Grandia Johannes
McChesney William G.
Santini Hugo A. E.
Turk Harold L.
International Business Machines - Corporation
Kieninger Joseph E.
Plantz Bernard F.
Smith John D.
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