Holder for carrying a photolithography mask in a flattened...

Details Holder for carrying a photolithography mask in a flattened... Holder for carrying a photolithography mask in a flattened...

2006-09-29

2010-10-19

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000, C430S005000

Reexamination Certificate

active

07817252

ABSTRACT:
A holder is described for carrying a photolithography mask in a flattened condition. The holder may include a mask chuck and may be able to flatten a mask for use in photolithography. In one example, the holder may include a substrate and a plurality of independently controllable actuators coupled to the substrate and coupled to a photolithography mask to flatten the photolithography mask.

REFERENCES:
patent: 3188909 (1965-06-01), Wally, Jr. et al.
patent: 6542224 (2003-04-01), Ackerman et al.
patent: 6597434 (2003-07-01), Van Dijsseldonk
patent: 6947201 (2005-09-01), Ealey
patent: 2004/0013956 (2004-01-01), Sogard
patent: 2004/0051984 (2004-03-01), Oshino et al.
patent: 2004/0150871 (2004-08-01), Yang
patent: 2005/0146701 (2005-07-01), Holderer et al.
patent: 2006/0050420 (2006-03-01), Smith et al.
patent: 2000- 286191 (2000-10-01), None

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