Hinged glass photomask assembly

Details Hinged glass photomask assembly Hinged glass photomask assembly

1981-01-13

1983-11-01

Mathews, A. A.

Photocopying

Contact printing

Plural exposure stations or plural machines

355132, 16225, 430321, G03B 2704

Patent

active

044127391

ABSTRACT:
A method and article are disclosed for facilitating repeated use in a photolithographic imaging process of a photomask assembly comprising a pair of glass plates by means of a flexible polymeric hinge permanently joining said pair of glass plates.

REFERENCES:
patent: 2829081 (1958-04-01), Sweem
patent: 3441975 (1969-05-01), Shepherd
patent: 3877808 (1975-04-01), Jasperson
patent: 3881303 (1975-05-01), Krafka et al.
patent: 3927943 (1975-12-01), Pohl et al.
patent: 4032233 (1977-06-01), Oscarsson et al.
patent: 4144066 (1979-03-01), Ernsberger
patent: 4155735 (1979-05-01), Ernsberger
patent: 4159176 (1979-06-01), Masi

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