Hinge unit for vacuum-processing a semiconductor wafer

Details Hinge unit for vacuum-processing a semiconductor wafer Hinge unit for vacuum-processing a semiconductor wafer

1998-04-21

2000-05-09

Douglas, Alan P.

Machines not elsewhere specified

Material working, abrading, or founding machinery

D8323, D15138, D15141, 1509

Patent

active

D04245830

REFERENCES:
patent: D139795 (1944-12-01), Terry
patent: 1120163 (1914-12-01), Sanders
patent: 4011628 (1977-03-01), Bengtsson
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 5195210 (1993-03-01), Lee

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