Hinge structures for micro-mirror arrays

Details Hinge structures for micro-mirror arrays Hinge structures for micro-mirror arrays

2005-10-04

2005-10-04

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

06952302

ABSTRACT:
A method and spatial light modulator are provided herein. The spatial light modulator has a higher resolution and an increased fill factor. The spatial light modulator also provides an increased contrast ratio. Furthermore, the spatial light modulator of the present invention can be operated in the absence of polarized light and that has improved electro-mechanical performance and robustness with respect to manufacturing. A method and its alternative are disclosed herein by the present invention for manufacturing the spatial light modulator.

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patent: 5652671 (1997-07-01), Knope et al.
patent: 5696619 (1997-12-01), Knope et al.
patent: 5942054 (1999-08-01), Tregilgas et al.
patent: 2002/0196524 (2002-12-01), Huibers et al.

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